The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2018
Filed:
Feb. 29, 2016
Jsr Corporation, Tokyo, JP;
Yuusuke Asano, Tokyo, JP;
Mitsuo Sato, Tokyo, JP;
Hiromitsu Nakashima, Tokyo, JP;
Kazuki Kasahara, Tokyo, JP;
Yoshifumi Oizumi, Tokyo, JP;
Masafumi Hori, Tokyo, JP;
Takanori Kawakami, Tokyo, JP;
Yasuhiko Matsuda, Tokyo, JP;
Kazuo Nakahara, Tokyo, JP;
JSR CORPORATION, Tokyo, JP;
Abstract
A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. Rrepresents an alkali-labile group. A represents an oxygen atom, —NR'—, —CO—O—or —SO—O—, wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R′ represents a hydrogen atom or an alkali-labile group, and '#' and '##' each indicate a bonding hand bonded to R.-A-R  (x).