The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2018
Filed:
Jun. 01, 2015
Ebara Corporation, Tokyo, JP;
Yuji Araki, Tokyo, JP;
Jumpei Fujikata, Tokyo, JP;
Masashi Shimoyama, Tokyo, JP;
Mizuki Nagai, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A plating apparatusincludes a rectifierconfigured to apply a DC current to a substrate, and a plating apparatus control unitthat instructs the rectifieron a value of the DC current. The plating apparatus control unithas a setting unitfor setting a current value, a storage unitthat stores a relational expression between an instructed current value on which the rectifieris instructed and an actual current value which the rectifieroutputs in accordance with the instructed current value, a calculation unitthat corrects the current value set by the setting uniton the basis of the above-mentioned relational expression to calculate a corrected current value, and an instruction unitthat instructs the rectifieron the corrected current value calculated by the calculation unit