The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2018
Filed:
May. 29, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C02F 1/463 (2006.01); C02F 1/461 (2006.01); C02F 103/02 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
C02F 1/463 (2013.01); C02F 1/46104 (2013.01); C02F 1/461 (2013.01); C02F 2103/02 (2013.01); C02F 2201/461 (2013.01); C02F 2201/4612 (2013.01); C02F 2201/4617 (2013.01); G03F 7/3007 (2013.01); G03F 7/3021 (2013.01);
Abstract
A treatment solution supply method of supplying a treatment solution to a substrate, the method includes the steps of: applying a DC voltage to the treatment solution; detecting a potential difference between two points in the treatment solution in a state where the DC voltage is applied to the treatment solution; and increasing the DC voltage when the detected potential difference is less than a predetermined reference value.