Ziyang Wu

Title: The Innovative Contributions of Ziyang Wu in Electrostatic Chuck Technology

Introduction

Ziyang Wu is an accomplished inventor based in Shanghai, China, known for his contribution to the field of micro-fabrication equipment. With a focus on enhancing manufacturing processes, Wu's innovations have significant implications for the semiconductor industry. His work has led to the development of a unique patent that showcases his expertise and inventive spirit.

Latest Patents

Ziyang Wu holds one noteworthy patent titled "Lift Pin Assembly, An Electrostatic Chuck and A Processing Apparatus where the Electrostatic Chuck is Located." This invention discloses a lift pin assembly designed to improve the functionality of an electrostatic chuck. The design includes a lift pin and a lift pin receiving channel connected to a pressure control device. An innovative feature is the sealing ring positioned at one end of the lift pin receiving channel, which makes contact with the back face of a wafer during processing. This design minimizes gas entry into the lift pin channel, allowing the pressure control device to operate independently and effectively manage the pressure within the channel.

Career Highlights

Ziyang Wu works at Advanced Micro-Fabrication Equipment Inc. in China, a company dedicated to providing high-performance processing equipment for the semiconductor industry. His career is marked by his commitment to innovation in fabrication processes, contributing to advancements that enhance efficiency and product quality.

Collaborations

Throughout his career, Wu has collaborated with talented professionals, including Tuqiang Q Ni and Rubin Ye. These collaborations have fostered an environment of innovation and continuous improvement within his field, further reinforcing the significance of teamwork in research and development.

Conclusion

Ziyang Wu stands out as a pioneering inventor in the micro-fabrication sector, with his patented invention of the lift pin assembly showcasing his talent and commitment to innovation. His work not only contributes to the advancement of technology but also underscores the vital role of inventors in shaping the future of industry standards. Wu's collaborations with esteemed colleagues further enhance the potential impact of his contributions, solidifying his position in the realm of inventions and patents.