Zhixiang Liu

Title: Zhixiang Liu: Innovator in Lithographic Technology

Introduction

Zhixiang Liu is a prominent inventor based in Chengdu, China. He has made significant contributions to the field of lithographic technology, particularly in the detection of optimal focal planes for projection objective lenses. His innovative work has implications for various applications in the semiconductor industry.

Latest Patents

Zhixiang Liu holds a patent for an "Apparatus and method for detecting optimal focal plane of lithographic projection objective lens." This invention includes an illumination device, a beam splitting device, a lens array, a mask plate, a reflecting device, a photoelectric detector, and a controller. The illumination device generates a collimated beam, which is transmitted through the beam splitting device, focused by the lens array to the mask plate for spatial-filtering, and delivered to the lithographic projection objective lens. The reflecting device reflects a focused beam passing through the lithographic projection objective lens to generate a reflected beam. The photoelectric detector detects the intensity of the reflected beam from the reflecting device after being spatial-filtered via the mask plate and generates a beam intensity signal. The controller controls the movement of a workpiece table and/or collects the beam intensity signal generated by the photoelectric detector. He has 1 patent to his name.

Career Highlights

Zhixiang Liu is affiliated with the Chinese Academy of Sciences, where he conducts research and development in advanced lithographic techniques. His work has been instrumental in enhancing the precision and efficiency of lithographic processes.

Collaborations

Zhixiang Liu has collaborated with notable colleagues, including Jiajun Xu and Tingwen Xing, contributing to advancements in their shared field of expertise.

Conclusion

Zhixiang Liu's innovative contributions to lithographic technology demonstrate his commitment to advancing the field. His patent and work at the Chinese Academy of Sciences highlight his role as a key figure in this important area of research.