Company Filing History:
Years Active: 2020-2024
Title: Zhili Zuo: Innovator in Particle Detection Technology
Introduction
Zhili Zuo is a prominent inventor based in Santa Clara, CA (US), known for his contributions to particle detection technology. With a total of 4 patents, Zuo has made significant advancements in the field, particularly in the detection of surface particles on chamber components.
Latest Patents
Zuo's latest patents focus on innovative methods for detecting surface particles using carbon dioxide. One of his patents describes a distribution unit of a particle detection system that initiates a particle collection process. This process dislodges surface particles from an article's surface based on a stream that includes solid CO particles or CO droplets. The collected particles are then measured to determine their concentration on a substrate. Another patent outlines a method where a stream directed at an article causes surface particles to dislodge, followed by a purge cycle that transports these particles away. This cycle includes generating laminar flows at varying velocities to ensure effective particle removal.
Career Highlights
Zhili Zuo is currently employed at Applied Materials, Inc., where he continues to develop and refine his innovative technologies. His work has been instrumental in enhancing the efficiency and accuracy of particle detection systems, which are crucial in various industrial applications.
Collaborations
Zuo has collaborated with notable colleagues, including Song-Moon Suh and Changgong Wang, contributing to the advancement of their shared research goals.
Conclusion
Zhili Zuo's work in particle detection technology exemplifies the impact of innovation in improving industrial processes. His patents reflect a commitment to advancing the field and addressing the challenges associated with surface particle detection.