Company Filing History:

4 out of 10,295

Tokyo Electron Limited

patents

Years Active: 2019-2020

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10763147 - Substrate warpage detection device, substrate warpage detection method, and substrate processing apparatus and substrate processing method using the same (2020-09-01),

2. 10615066 - Substrate warping monitoring device and substrate processing apparatus using the same, and substrate warping monitoring method (2020-04-07),

3. 10549305 - Support structure for suspended injector and substrate processing apparatus using same (2020-02-04),

4. 10294565 - Substrate processing apparatus (2019-05-21),

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Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.

For the Inventor, By the Inventor

Yuya Sasaki

Location History:

Company Filing History:

Years Active: 2019-2020