This inventor holds 5 USPTO granted patents. Top assignees: Kabushiki Kaisha Topcon, Other. Active years: 2001-2008.
Company Filing History:
4 out of 1,033 
1 out of 834,350 Years Active: 2001-2008
Title: Yutaka Shida: Innovator in Surface Inspection Technology
Introduction
Yutaka Shida is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of surface inspection technology, holding a total of 5 patents. His innovative approaches have advanced the methods used in inspecting the surfaces of various materials, particularly in the semiconductor industry.
Latest Patents
One of Yutaka Shida's latest patents is a surface inspection method and apparatus. This invention involves a method and apparatus for inspecting the surface of a wafer. It utilizes two or more kinds of lasers that can be switched or mixed to ensure that the laser makes contact with the film-coated wafer at the same incident angle. The inspection apparatus stores data related to the inspection and film parameters in an associated state, allowing for predetermined inspection conditions to be achieved. During measurements, the operator can set the film parameters, such as film thickness and refraction index, which enables the automatic adjustment of the inspection conditions.
Another notable patent is the surface inspecting apparatus and method. This apparatus includes a light source section that emits two luminous fluxes, each directed at different angles onto the inspected object. The system is designed to receive and process scattered light from both fluxes, converting them into signals that form inspection object distribution data. This data is then processed to identify any scratches or defects on the surface of the inspected object.
Career Highlights
Yutaka Shida has worked with notable companies, including Kabushiki Kaisha Topcon. His work in these organizations has allowed him to develop and refine his innovative technologies in surface inspection.
Collaborations
Throughout his career, Yutaka has collaborated with esteemed colleagues such as Hisashi Isozaki and Takao Tango. These partnerships have contributed to the advancement of his inventions and the overall field of surface inspection technology.
Conclusion
Yutaka Shida's contributions to surface inspection technology have made a significant impact in the industry. His innovative patents and collaborations highlight his expertise and dedication to advancing this critical field.