Company Filing History:
2 out of 832,912 Years Active: 2003
Title: **Yutaka Amijima: Innovator in Chemical Vapor Deposition**
Introduction
Yutaka Amijima is an accomplished inventor based in Kanagawa, Japan. With two patents to his name, he specializes in advancements in chemical vapor deposition, crucial for semiconductor film production. His innovations contribute significantly to the field of materials science and engineering.
Latest Patents
Amijima’s latest patents focus on a **Chemical Vapor Deposition Apparatus** and **Chemical Vapor Deposition Method**. The apparatus features a horizontal tubular reactor equipped with a susceptor, heater, feed gas introduction portion, and a reaction gas exhaust section. Notably, part of the tubular reactor’s walls slopes downward from the upstream side of the feed gas passage to the downstream side. This design enhances the efficiency of the deposition process.
Furthermore, his patented method outlines the efficient operation of the apparatus by supplying a feed gas parallel to the substrate within the horizontal reactor. Additionally, a forcing gas is introduced perpendicular to the substrate, carefully controlling the flow rate to achieve superior quality crystals. This technique avoids the accumulation of decomposed products on the reactor walls, making it ideal for large substrates or simultaneous processing.
Career Highlights
Yutaka Amijima has made substantial contributions to the field of semiconductor manufacturing through his innovative approaches to chemical vapor deposition. His expertise helps refine processes that are essential for producing high-quality semiconductor films, which are integral to modern electronics.
Collaborations
Throughout his career, Amijima has worked alongside notable colleagues such as Shiro Sakai and Yukichi Takamatsu. Their collaboration underscores the importance of teamwork in driving innovation and enhancing technological advancements in semiconductor production.
Conclusion
Yutaka Amijima stands out as a significant figure in the realm of chemical vapor deposition. His innovative patents not only improve the efficiency of semiconductor film production but also pave the way for future advancements in the technology sector. As the demand for high-performance semiconductors continues to grow, inventions like those of Amijima will play a crucial role in meeting industry needs.