Yung-Chi Wang

Title: Yung-Chi Wang: Innovator in Polysilicon Thin Film Transistors

Introduction

Yung-Chi Wang is a notable inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the fabrication of polysilicon thin film transistors. His innovative methods have enhanced the efficiency and reliability of these devices.

Latest Patents

Yung-Chi Wang holds a patent for a "Method for fabricating a polysilicon thin film transistor." This method combines the channel oxidation process and the plasma hydrogenation process. The fabrication process includes several steps: forming a field oxide layer on a silicon substrate, creating a polysilicon layer to serve as a gate, and forming a gate oxide on the polysilicon layer. Additionally, it involves defining source and drain regions in the polysilicon channel, oxidizing another portion of the channel, forming a dielectric layer, and hydrogenating the transistor by plasma. This innovative combination results in improved efficiency for passivating tail state traps and prevents damage to the polysilicon thin film during the hydrogenation process. The resulting polysilicon thin film transistor exhibits a lower subthreshold swing, a higher on/off current ratio, and excellent reliability.

Career Highlights

Yung-Chi Wang is associated with the National Science Council, where he continues to advance research in semiconductor technologies. His work has been instrumental in developing methods that enhance the performance of electronic devices.

Collaborations

Yung-Chi Wang has collaborated with notable colleagues, including Yean-Kuen Fang and Dun-Nien Yang. Their joint efforts have contributed to the advancement of research in the field of thin film transistors.

Conclusion

Yung-Chi Wang's innovative methods in the fabrication of polysilicon thin film transistors have made a significant impact on semiconductor technology. His contributions continue to influence the development of reliable and efficient electronic devices.