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Years Active: 2007-2013
Title: Yumiko Koura: Innovator in Semiconductor Technology
Introduction
Yumiko Koura is a prominent inventor based in Kawasaki, Japan. She has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. Her work focuses on improving the performance and reliability of semiconductor devices, particularly in relation to copper diffusion prevention.
Latest Patents
Among her latest patents is a method for manufacturing semiconductor devices that feature an improved copper diffusion preventive function for plugs and wirings made of copper or copper alloy. This innovative process involves several key steps: first, a copper alloy film containing at least two types of metal elements, in addition to copper, is formed on the surface of an insulator that contains oxygen and is situated on a semiconductor substrate. Next, a metal film made of pure copper or copper alloy is applied on top of the copper alloy film. Following these steps, heat treatment is performed to create a metal oxide film on the insulator's surface through a reaction between the oxygen in the insulator and the metal elements in the copper alloy film. Another notable patent involves a semiconductor device with copper wiring, which includes a first interlayer insulating film over an underlying substrate, a via hole filled with a conductive plug made of copper or a copper alloy, and a second interlayer insulating film that features a wiring groove exposing the upper surface of the conductive plug.
Career Highlights
Yumiko Koura has worked with notable companies in the semiconductor industry, including Fujitsu Semiconductor Limited and Fujitsu Microelectronics Limited. Her experience in these organizations has allowed her to develop and refine her innovative approaches to semiconductor manufacturing.
Collaborations
Yumiko has collaborated with esteemed colleagues such as Hideki Kitada and Kiyoshi Ozawa, contributing to advancements in semiconductor technology through teamwork and shared expertise.
Conclusion
Yumiko Koura's contributions to semiconductor technology are noteworthy, as she continues to innovate and improve the functionality of semiconductor devices. Her patents reflect her dedication to enhancing the performance of materials used in this critical field.