Location History:
- Juou, JP (1993)
- Ibaraki, JP (1993 - 1995)
- Juuou-machi, JP (1996 - 1998)
Company Filing History:
7 out of 42,496 
3 out of 18 Years Active: 1993-1998
Title: Yukinobu Shibata - A Pioneer in Exposure Technology
Introduction
Yukinobu Shibata is a notable inventor based in Ibaraki, Japan, recognized for his significant contributions to exposure technology in the semiconductor industry. With a remarkable portfolio of 7 patents, Shibata continues to innovate, developing advanced systems that enhance the efficiency and reliability of pattern exposure processes.
Latest Patents
Shibata's latest invention focuses on an exposure method and a pattern data preparation system. This groundbreaking technology allows for selective pattern exposure with high reliability, utilizing a combination of repeated and non-repeated patterns. The innovative exposure technology is designed to improve the preparation efficiency of pattern data and ensure the inspection of aperture patterns. Central to this invention is the utilization of an electron beam as a focused beam, which is integrated into a sophisticated pattern exposure apparatus featuring a batch transfer system for transferring various graphic patterns associated with semiconductor integrated circuits. The key components of this apparatus include an EB drawing section, a control I/O section, a drawing control section, and a data storage section. The electron beam path is meticulously arranged with various essential elements such as masks, blanking electrodes, and deflectors to enhance the accuracy of exposure.
Career Highlights
Throughout his career, Yukinobu Shibata has worked for esteemed companies, notably Hitachi, Ltd. and Hitachi Instrument Engineering Co., Ltd. His extensive experience in these organizations has been instrumental in shaping his expertise in exposure technologies and semiconductor applications.
Collaborations
Shibata has collaborated with distinguished coworkers, including Haruo Yoda and Akira Hirakawa, who have contributed to his projects and innovations in the field. These collaborations have fostered a dynamic exchange of ideas, leading to the creation of advanced exposure technologies.
Conclusion
Yukinobu Shibata stands out as an influential inventor in the realm of exposure technology, with a strong focus on improving the efficiency and reliability of semiconductor patterning processes. His contributions through patented innovations continue to play a crucial role in the advancement of the semiconductor industry, making lasting impacts on technology as we know it today.