Yukihiro Satoh

Title: Yukihiro Satoh: Innovating Semiconductor Technology

Introduction

Yukihiro Satoh is a distinguished inventor based in Kawasaki, Japan, known for his contributions to the field of semiconductor technology. With a focus on enhancing the manufacturing processes of semiconductor devices, he has developed an innovative method that improves the reliability and efficiency of copper wiring in these devices.

Latest Patents

Yukihiro Satoh holds one notable patent titled "Semiconductor device with copper wiring and its manufacture method." This patent outlines a method of manufacturing semiconductor devices that includes forming copper wiring and reducing an oxide film on the wiring's surface. His process involves heating the copper wiring to a temperature between 250°C and 450°C under reductive gas, or treating it in plasma of reductive gas. The advantage of this method is that it allows the formation of a film made from materials that do not contain oxygen on the copper wiring, all while protecting the wiring from exposure to the external atmosphere. This innovation results in semiconductor devices with superior copper wiring, enhancing both performance and reliability.

Career Highlights

Yukihiro Satoh has dedicated his professional career to advancing semiconductor manufacturing techniques. His work at Fujitsu Corporation has positioned him as a key figure in the realm of electronic innovations. His contributions not only enhance the manufacturing processes but also pave the way for more reliable semiconductor devices.

Collaborations

Throughout his career, Yukihiro Satoh has collaborated with renowned colleagues such as Hideo Takagi and Kiyoshi Izumi. These partnerships have enriched his research and development endeavors, enabling him to innovate and refine semiconductor technologies alongside other prominent minds in the industry.

Conclusion

Yukihiro Satoh's expertise and innovative spirit continue to make significant impacts in the semiconductor domain. His patent on copper wiring manufacturing not only exemplifies his commitment to advancing technology but also highlights the importance of collaboration and research in driving invention. As technology evolves, contributions from inventors like Satoh become increasingly vital to the industry's growth and advancement.