This inventor holds 1 USPTO granted patent. Top assignee: Kabushiki Kaisha Toshiba. Active years: 1996.
Company Filing History:
Years Active: 1996
Title: Yuji Takigami: Innovator in Charged Beam Technology
Introduction
Yuji Takigami is a notable inventor based in Isehara, Japan. He has made significant contributions to the field of charged beam technology, particularly through his innovative patent that enhances drawing accuracy in charged beam drawing apparatuses.
Latest Patents
Takigami holds a patent for a "Charged Beam Drawing Apparatus." This invention allows for the precise drawing of desired patterns on a sample by deflecting a charged beam while continuously moving the stage on which the sample is placed. The apparatus features a mark with a line-and-space pattern, consisting of heavy metal marks arranged with equal spaces. By fixing the position of the charged beam and moving the stage, the apparatus can detect a reflected beam, enabling the measurement of relative vibrations during the stage's movement. This innovation significantly increases drawing accuracy.
Career Highlights
Yuji Takigami is associated with Kabushiki Kaisha Toshiba, a leading company in technology and innovation. His work at Toshiba has allowed him to develop and refine his inventions, contributing to advancements in charged beam technology.
Collaborations
Takigami has collaborated with notable coworkers, including Tooru Koike and Ichiro Mori. Their combined expertise has fostered a productive environment for innovation and development in their respective fields.
Conclusion
Yuji Takigami's contributions to charged beam technology exemplify the impact of innovative thinking in engineering. His patent for the charged beam drawing apparatus showcases his commitment to enhancing precision in technological applications.