Location History:
- Annaka, JP (2000 - 2002)
- Nishishirakawa, JP (2016)
- Nishigo-mura, JP (2020)
Company Filing History:
3 out of 1,100 
1 out of 832,761 Years Active: 2000-2020
Title: Yuji Okubo: Innovator in Wafer Processing Technologies
Introduction
Yuji Okubo is a notable inventor based in Nishigo-mura, Japan. He has made significant contributions to the field of wafer processing, holding a total of 4 patents. His innovative work focuses on improving the efficiency and quality of wafer handling and processing.
Latest Patents
One of his latest patents is a load port and method for carrying wafers. This invention includes a tabular portion that forms part of a wall surface of a wafer carrying chamber, featuring an opening for access. It also incorporates a mounting table for a wafer storage container, a door section for opening and closing the chamber, and a sucking tool for holding a lid. The design includes a latch mechanism for securing the container and a storage section for the latch driving mechanism. This load port is engineered to maintain air pressure equal to or lower than that of a clean room, effectively preventing dust from adhering to the wafers.
Another significant patent is a reclaiming processing method for delaminated wafers. This method allows for the reclaiming polishing of delaminated wafers, which are by-products from the production of bonded wafers. The process ensures that the delaminated surface remains free of oxide film while the opposite side is polished, thus improving the quality of the reclaimed wafers.
Career Highlights
Yuji Okubo has worked with Shin-Etsu Handotai Co., Ltd., where he has contributed to advancements in wafer technology. His experience in the industry has allowed him to develop innovative solutions that address common challenges in wafer processing.
Collaborations
Throughout his career, Okubo has collaborated with notable colleagues such as Yasushi Kurosawa and Kyoji Oguro. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in the field.
Conclusion
Yuji Okubo's contributions to wafer processing technologies demonstrate his commitment to innovation and quality. His patents reflect a deep understanding of the challenges in the industry and provide effective solutions to enhance wafer handling and processing.