Tokyo, Japan

Yuji Fukuda

USPTO Granted Patents = 1 

Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 66(Granted Patents)


Company Filing History:


Years Active: 1999

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1 patent (USPTO):Explore Patents

Title: Innovator Spotlight: Yuji Fukuda

Introduction: Yuji Fukuda is a notable inventor based in Tokyo, Japan, recognized for his contributions to the field of photoresist processing technology. With a keen focus on developing innovative methods, Fukuda has secured a patent that showcases his expertise and creativity in the semiconductor manufacturing industry.

Latest Patents: Fukuda holds a patent titled "Method of and apparatus for processing photoresist, method of evaluating." This patent outlines a resist processing method that involves setting a substrate at a specific temperature and forming a resist film on it. The process includes applying a resist solution while the substrate is turned at the designated temperature, followed by heating the substrate, cooling it to a specific temperature after heating, and measuring the resist film's thickness between these processes.

Career Highlights: Currently, Yuji Fukuda is employed at Tokyo Electron Limited, a leading semiconductor manufacturer. His work at this prestigious company involves advancing technologies that are crucial for the fabrication of integrated circuits and other electronic components.

Collaborations: Throughout his career, Fukuda has collaborated with talented coworkers, including Masami Akimoto and Kosuke Yoshihara. These partnerships have played a significant role in fostering an environment of innovation and excellence in their projects.

Conclusion: Yuji Fukuda's inventive spirit and dedication to improving photoresist processing methods make him a significant figure in the realm of semiconductor technology. His patent reflects the potential for advancements in the industry, and his ongoing work at Tokyo Electron Limited continues to impact the world of electronics positively.

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