Company Filing History:
Years Active: 2023
Title: Yuhei Matsunaga: Innovator in Wafer Edge Polishing Technology
Introduction
Yuhei Matsunaga is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of wafer processing. His innovative approach has led to the development of advanced technologies that enhance the efficiency and effectiveness of wafer edge polishing.
Latest Patents
Matsunaga holds a patent for a "Wafer edge polishing apparatus and method." This invention includes a cleaning mechanism that effectively removes slurry residue adhered to a chuck table. The apparatus features a chuck table that holds a wafer, a rotation drive mechanism for rotating the chuck table, and an edge polishing unit that polishes the wafer's edge while supplying slurry. Additionally, a cleaning unit is incorporated to remove any slurry residue from the chuck table, utilizing high-pressure cleaning and brush-cleaning techniques.
Career Highlights
Yuhei Matsunaga is currently employed at Sumco Corporation, a leading company in the semiconductor industry. His work focuses on improving wafer processing technologies, which are crucial for the production of high-quality semiconductor devices. His innovative contributions have positioned him as a key figure in the field.
Collaborations
Matsunaga collaborates with talented professionals such as Makoto Ando and Tatsunori Izumi. Together, they work on advancing technologies that drive the semiconductor industry forward.
Conclusion
Yuhei Matsunaga's contributions to wafer edge polishing technology exemplify his commitment to innovation in the semiconductor field. His patent and collaborative efforts continue to influence the industry positively.