Yuebin B Ning

Title: Innovations of Yuebin B Ning in Capacitive Microphone Technology

Introduction

Yuebin B Ning is a notable inventor based in Edmonton, Canada. He has made significant contributions to the field of microelectromechanical systems (MEMS), particularly in the development of capacitive microphones. His innovative approach has led to advancements in microphone fabrication techniques.

Latest Patents

Yuebin B Ning holds a patent for the "Fabrication of a surface micromachined capacitive microphone." This patent describes a process for fabricating capacitive microphones using etch-release of sacrificial silicon by an isotropic dry etchant. The method allows for the production of microphones primarily from chemical vapor deposition (CVD) processes, providing flexibility in material selection. Notably, the dry etch chemistry used in this process does not require freeze-drying after release, which simplifies the manufacturing process. The etchant is designed to avoid damaging electrodes or metallized circuitry, enabling the placement of electrodes between the backplate and diaphragm dielectric layers. Additionally, diffusion barrier layers are incorporated to protect materials from interdiffusion during device fabrication. This innovative process is particularly suitable for microphones that utilize silicon nitride dielectric layers with aluminum electrodes.

Career Highlights

Throughout his career, Yuebin B Ning has worked with prominent organizations such as the Alberta Microelectronic Centre and Harris Canada, Inc. His experience in these institutions has contributed to his expertise in microelectronics and MEMS technology.

Collaborations

Yuebin has collaborated with notable colleagues, including Alan W Mitchell and R Niall Tait. These collaborations have further enriched his work and contributed to advancements in the field.

Conclusion

Yuebin B Ning's contributions to the development of capacitive microphones demonstrate his innovative spirit and technical expertise. His patented techniques have the potential to influence future advancements in microphone technology.