Company Filing History:
Years Active: 2025
Title: Innovations by Yu-Kai Chiou
Introduction
Yu-Kai Chiou is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of cleaning equipment for wafer chucks.
Latest Patents
Yu-Kai Chiou holds two patents that focus on methods and apparatuses for removing contamination from EUV wafer chucks or clamps. His latest patents include a cleaning equipment design that effectively removes particles accumulated between burls on the surface of the wafer chuck. The innovative equipment features a spinning bi-polar electrode placed in proximity to the surface, which attracts and adsorbs charged particle residue using a generated symmetric electric field when the wafer chuck is not in use.
Career Highlights
Chiou is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he applies his expertise in semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of cleaning processes in semiconductor manufacturing.
Collaborations
Some of his notable coworkers include Yu-Chih Huang and Li-Jui Chen, who collaborate with him on various projects within the company.
Conclusion
Yu-Kai Chiou's innovative patents and contributions to the semiconductor industry highlight his role as a key inventor in the field. His work continues to influence advancements in cleaning technologies for wafer chucks, showcasing the importance of innovation in semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.