Yu Ding

Title: Innovations by Inventor Yu Ding in Substrate Processing Systems

Introduction

Yu Ding, a prominent inventor located in Los Altos, CA, has made significant contributions in the field of substrate processing systems. With a singular patent to his name, he showcases a profound understanding of model-based scheduling techniques. His work is particularly valuable in the semiconductor industry, where precision and efficiency are paramount.

Latest Patents

Yu Ding's key patent is titled "Model-based scheduling for substrate processing systems." This groundbreaking invention focuses on etching tools where a neural network model is employed to predict optimal scheduling parameter values. The model utilizes data from preventive maintenance operations, recipe times, and wafer-less auto-clean times as inputs. By capturing the underlying relationships between scheduling parameters and various wafer processing scenarios, the model enhances prediction accuracy. Furthermore, it employs a nested neural network model for tools engaged in multiple parallel material deposition processes. This innovative approach, which begins with offline training using simulated data and transitions to online training with real tool data, effectively predicts wafer routing paths and scheduling. The resulting advancements lead to improved scheduler pacing, heightened tool and fleet utilization, minimized wait times, and accelerated throughput.

Career Highlights

Yu Ding's career has been characterized by his tenure at Lam Research Corporation, where he has played an instrumental role in advancing substrate processing technology. His expertise combines theoretical knowledge with practical applications, leading to innovations that greatly benefit the semiconductor manufacturing sector.

Collaborations

Throughout his career, Yu has collaborated with notable colleagues, including Raymond Chau and Chung-Ho Huang. These partnerships have further enriched his research and development endeavors, contributing to the success of his patented technologies.

Conclusion

In conclusion, Yu Ding stands as a key figure in the realm of semiconductor innovations, particularly through his patent for model-based scheduling in substrate processing systems. His work at Lam Research Corporation, combined with valuable collaborations, underscores his impact on enhancing manufacturing efficiency and precision in the industry. As he continues to innovate, the future of substrate processing technology looks increasingly promising.