Company Filing History:
Years Active: 2005-2010
Title: Innovator Spotlight: Yousun Kim Taylor
Introduction
Yousun Kim Taylor, an accomplished inventor based in Santa Clara, CA, has made significant contributions to the field of semiconductor manufacturing. With a total of two patents to his name, Taylor has demonstrated a commitment to pushing the boundaries of technology and innovation.
Latest Patents
Yousun Kim Taylor's latest patents reflect his expertise in etching processes essential for modern semiconductor fabrication. The first patent, titled "Dual doped polysilicon and silicon germanium etch," provides a method for etching a stack that includes at least one silicon germanium layer over a substrate within a processing chamber. This method leverages an etchant gas comprising HBr, an inert diluent, and various reactive gases like oxygen and nitrogen, all while maintaining a substrate temperature below 40°C. The etching gas is subsequently transformed into plasma to effectively etch the silicon germanium layer.
The second patent, "Method and compositions for hardening photoresist in etching processes," discloses a method for etching a wafer with a photoresist pattern. This innovative approach involves curing the photoresist material using a bromine-containing plasma and subsequently executing a main etch of the wafer. The method ensures that the underlying layer of the wafer remains unetched, showcasing Taylor's attention to detail and process refinement.
Career Highlights
Yousun Kim Taylor is currently associated with Lam Research Corporation, a leader in developing innovative technologies for semiconductor processing. His role at Lam Research has allowed him to advance the efficiency and effectiveness of etching processes that are crucial for the production of integrated circuits.
Collaborations
During his career, Taylor has collaborated with notable colleagues including C. Robert Koemtzopoulos and Yoko Yamaguchi Adams. These collaborations have facilitated the exchange of ideas and fostered innovation in their respective projects, further enhancing the impact of their work in the semiconductor industry.
Conclusion
In summary, Yousun Kim Taylor is a distinguished inventor whose innovations in etching processes have advanced semiconductor technology. His patents demonstrate a profound understanding of materials and manufacturing techniques, marking him as a key contributor to the field. As he continues to innovate at Lam Research Corporation, Taylor's work will undoubtedly leave a lasting impression on the industry.