Company Filing History:
Years Active: 2002-2004
Title: Young-sun Koh: Innovator in Semiconductor Technology
Introduction
Young-sun Koh is a notable inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of semiconductor technology, holding 2 patents that focus on advanced methods for forming trench isolation regions.
Latest Patents
His latest patents include innovative methods for creating trench isolation regions that incorporate recess-inhibiting layers. These methods involve forming a semiconductor substrate with a trench and a masking layer, which may consist of silicon nitride. A recess-inhibiting layer is then applied to the sidewalls of both the trench and the masking layer. Following this, a stress-relief layer is formed on the recess-inhibiting layer, which helps to mitigate the effects of overetching during the manufacturing process. The trench is subsequently filled with a trench isolation layer, and a series of planarization or etch-back steps are performed to ensure proper alignment with the substrate surface. This innovative approach reduces the recession of the stress-relief layer and minimizes the development of voids.
Career Highlights
Young-sun Koh is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in enhancing the reliability and performance of semiconductor devices.
Collaborations
He collaborates with talented individuals such as Sung-eui Kim and Keum-joo Lee, who contribute to the innovative environment at Samsung Electronics.
Conclusion
Young-sun Koh's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes.