Young-Ha Yoon, based in Gyeonggi-do, South Korea, is a notable inventor recognized for his contributions to the field of ion implantation technology. With a total of three patents to his name, Yoon's innovations enhance processes crucial for various applications in semiconductor manufacturing.

Latest Patents

1. **Ion Implanter with Etch Prevention Member(s)**

This patent describes an advanced apparatus and method for doping ions into substrates. The design includes a process chamber where ion implantation occurs, featuring a support unit that is electrically connected to a first power source, generating high frequency pulses. The conductive unit in the chamber, positioned to generate plasma during the ion implantation procedure, includes a first etch prevention member. This member safeguards the conductive unit from being etched by the source gas used to create plasma, while a power port connected to a second power source applies radio frequency power to the conductive unit.

2. **Movable Inclination-Angle Measuring Apparatus for Ion Beam, and Method of Use**

Yoon's second patent presents a movable apparatus designed to measure the inclination angle of both spot ion beams and ribbon ion beams. This innovative device is installed in the X-axis direction of an ion supplying unit of an ion implantation system. It comprises an ion current measuring unit equipped with an ion-beam receiving device to capture the ion beam and measure the induced ion current. Furthermore, the apparatus features an angle adjusting unit that allows for adjustments around the Y-axis and Z-axis, as well as a position adjusting unit to move the device in the Z-axis direction. The inclination angle is computed through changes in the measured ion currents as the receiving angle is varied.

Career Highlights

Young-Ha Yoon is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of ion implantation technology. His work impacts the semiconductor industry by improving efficiency and effectiveness in ion implantation techniques, which are vital for the production of advanced electronic components.

Collaborations

Yoon collaborates with talented individuals, including his coworkers Il-Kyoung Kim and No-Hyun Huh. These collaborations foster innovation and enhance the development of cutting-edge technologies at Samsung Electronics.

Conclusion

With his impressive patents and contributions to ion implantation technology, Young-Ha Yoon stands as a significant figure in the innovation landscape. His work not only advances technical capabilities within the semiconductor industry but also exemplifies the spirit of inventive excellence in modern technology.

Profile summary based on public USPTO records.

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