Company Filing History:
Years Active: 2020-2022
Title: You Arisawa: Innovator in Exposure Devices and Developing Methods
Introduction
You Arisawa is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of exposure devices and developing methods, holding a total of 2 patents. His innovative work has advanced the technology used in substrate processing.
Latest Patents
Arisawa's latest patents include an exposure device and a developing method. The exposure device features a cylindrical peripheral wall member that creates a processing space for substrate storage. This device includes an upper opening and a lower opening, with a light emitter positioned to close the upper opening. A movable lower lid member is designed to open and close the lower opening, allowing for the replacement of the atmosphere in the processing space with an inert gas. In this setup, vacuum ultraviolet rays are emitted from the light emitter to expose the substrate.
The developing method involves a unique approach to dispensing a surfactant rinse liquid. After a developing step, the second nozzle dispenses the rinse liquid away from the center of a rotating substrate. This technique ensures that the center of the substrate does not enter the reaching region of the rinse liquid, leading to a more uniform line width of the resist pattern across the substrate's surface.
Career Highlights
You Arisawa is currently employed at Screen Holdings Co., Ltd., where he continues to innovate in his field. His work has been instrumental in enhancing the efficiency and effectiveness of substrate processing technologies.
Collaborations
Arisawa collaborates with talented individuals such as Masaya Asai and Masahiko Harumoto. Their combined expertise contributes to the advancement of technologies in their respective fields.
Conclusion
You Arisawa's contributions to exposure devices and developing methods highlight his role as a key innovator in the industry. His patents reflect a commitment to improving substrate processing technologies, making a lasting impact in the field.
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