Yoshiyuki Katamata

Title: Innovations of Yoshiyuki Katamata

Introduction

Yoshiyuki Katamata is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of optical technology, particularly in the development of projection exposure apparatuses. With a total of 2 patents, his work has had a substantial impact on the industry.

Latest Patents

Katamata's latest patents include a projection exposure apparatus and a method for correcting positional discrepancies of images in segmental areas. This innovative method addresses issues caused by the stretching of a substrate in the Y direction. By adjusting the magnifications of respective projection optical systems and the inclinations of parallel plane glass pieces, positional discrepancies can be accurately detected and corrected. Furthermore, if the initial correction is insufficient, adjustments can be made to ensure that the discrepancies are minimized. His second patent focuses on an exposure method and apparatus that enhances focus accuracy during alignment, even when substrates exhibit warpage. This is achieved by utilizing detection results from focus sensors located near the ends of the substrate, allowing for improved alignment accuracy.

Career Highlights

Yoshiyuki Katamata has built a successful career at Nikon Corporation, a leading company in the field of imaging and optical products. His innovative work has contributed to the advancement of projection technology, making significant strides in the accuracy and efficiency of optical systems.

Collaborations

Some of his notable coworkers include Masamitsu Yanagihara and Kei Hara, who have collaborated with him on various projects within Nikon Corporation.

Conclusion

Yoshiyuki Katamata's contributions to optical technology through his patents and work at Nikon Corporation highlight his role as a key innovator in the field. His advancements in projection exposure apparatuses and focus control methods continue to influence the industry positively.