This inventor holds 1 USPTO granted patent. Top assignee: Canon Kabushiki Kaisha. Active years: 2003.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2003
Title: Yoshio Kawanobe: Inventor in Projection Exposure Technology.
Introduction
Yoshio Kawanobe is an inventor associated with Utsunomiya, Japan, and Canon Kabushiki Kaisha. His recorded patent concerns focus measurement in projection exposure apparatus.
Latest Patents
Kawanobe is credited with 1 patent, titled “Focus Measurement in Projection Exposure Apparatus.” The invention describes a method for detecting focus information about an image-projecting optical system. It projects marks using illumination lights with different chief-ray incidence directions, arranging the resulting mark images to overlap approximately at an imaging plane. Focus information is then determined from information about any deviation between the superposed images.
Career Highlights
Kawanobe’s patent work addresses focus measurement in optical projection systems, a technology relevant to projection exposure apparatus. The available information associates him with Canon Kabushiki Kaisha.
Collaborations
Yoshihiro Shiode and Hiroshi Morohoshi are identified as Kawanobe’s coworkers.
Conclusion
Yoshio Kawanobe’s recorded contribution is a patent for measuring focus in projection exposure apparatus through the comparison of superposed mark images.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile