Hyogo, Japan

Yoshio Hayashide


Average Co-Inventor Count = 1.3

ph-index = 4

Forward Citations = 138(Granted Patents)


Company Filing History:


Years Active: 1994-1998

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5 patents (USPTO):Explore Patents

Title: Innovations of Yoshio Hayashide in Semiconductor Technology

Introduction

Yoshio Hayashide is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on methods that enhance the manufacturing processes of semiconductor devices, particularly in achieving planarized surfaces.

Latest Patents

One of Yoshio Hayashide's latest patents is a method of making a semiconductor device having a planarized surface. The objective of this invention is to effectively reduce differences in level in a short time for convex patterns that spread horizontally on a large scale. The process involves forming an insulating film on a semiconductor substrate to cover the convex pattern and fill in any concave portions. A portion of the insulating film located on the planarized section of the convex pattern is selectively etched away, leaving a frame-shaped insulating film on the outer periphery of the convex pattern. The remaining insulating film on the semiconductor substrate is then etched using a chemical/mechanical polishing method, resulting in a planarized surface of the semiconductor substrate.

Career Highlights

Yoshio Hayashide is associated with Mitsubishi Electric Corporation, where he has been instrumental in advancing semiconductor technologies. His innovative approaches have led to improvements in manufacturing efficiency and product quality in the semiconductor industry.

Collaborations

Yoshio has collaborated with notable coworkers, including Wataru Wakamiya and Kouichirou Tsujita. Their combined expertise has contributed to the successful development of various semiconductor technologies.

Conclusion

Yoshio Hayashide's contributions to semiconductor technology through his innovative patents have significantly impacted the industry. His work continues to pave the way for advancements in semiconductor manufacturing processes.

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