Yoshinori Makita

Title: **Yoshinori Makita: Innovator in Lithography Technology**

Introduction

Yoshinori Makita, a notable inventor based in Utsunomiya, Japan, has made significant contributions to the field of lithography. With a total of five patents to his name, Makita has developed advanced technologies that enhance manufacturing processes, particularly in the semiconductor industry.

Latest Patents

Among his latest innovations, two patents stand out for their ingenuity and practicality. The first patent, titled "Lithography apparatus and method of manufacturing article," introduces a lithography apparatus designed to form patterns on substrates. This apparatus is equipped with a motor that drives a tabletop while implementing a driving profile. It features a setting unit that allows the operation mode of the motor to transition between normal and power-saving modes. The power-saving mode is engineered to reduce the amount of heat generated by the motor during operation while maintaining the efficiency of substrate processing.

The second patent, "Positioning device, lithographic apparatus using same, and device manufacturing method," describes a sophisticated positioning device crucial for aligning the table. This device comprises a base, a motor for table movement, and a position sensor to detect the table's location. Noteworthy is the inclusion of a control unit that not only regulates the motor's position but also provides thrust force towards the center of the driving area, enhancing accuracy and efficiency in manufacturing.

Career Highlights

Yoshinori Makita currently works at Canon Kabushiki Kaisha, a leading company known for its innovations in imaging and optical products. His role as an inventor within this organization allows him to explore and develop cutting-edge technologies that contribute to Canon's legacy of excellence in the industry.

Collaborations

In his journey of innovation, Makita collaborates with talented individuals such as Shinji Wakui and Tadashi Aoki. Together, they combine their expertise to push the boundaries of technological advancement in lithography and related fields.

Conclusion

Yoshinori Makita's contributions through his patents and collaborative efforts position him as a significant figure in lithography technology. His work not only paves the way for enhanced manufacturing processes but also reflects the ongoing commitment to innovation at Canon. Through his inventions, Makita continues to impact the semiconductor industry positively, demonstrating the vital role of inventors in shaping the future of technology.