Location History:
- Furukawa, JP (1986 - 1992)
- Nirasaki, JP (2002)
- Yamanashi, JP (2004)
Company Filing History:
10 out of 4,048 
1 out of 8 
3 out of 832,761 Years Active: 1986-2004
Title: Innovations of Yoshinori Kato
Introduction
Yoshinori Kato is a prominent inventor based in Furukawa, Japan. He has made significant contributions to the field of technology, holding a total of 12 patents. His work primarily focuses on methods and apparatuses that enhance cleaning processes and substrate processing.
Latest Patents
One of Kato's latest patents is an "Apparatus and method for detecting an end point of a cleaning process." This innovative cleaning end point detecting apparatus identifies when contamination attached to the inner wall of a reaction chamber has been effectively removed. The process involves introducing a cleaning gas to create a cluster cloud and detached particles. A laser beam is then irradiated onto these particles, producing a scattered laser beam that is monitored as two-dimensional image information. The judging unit determines the end point of the cleaning process based on this information, specifically identifying the moment when neither detached particles nor the cluster cloud are detected.
Another notable patent is the "Vapor-phase processing method capable of eliminating particle formation." This method outlines a process for substrate treatment that avoids particle formation by determining an allowable margin of process conditions. It includes steps for selecting and executing the substrate processing under optimal conditions, ensuring high-quality results.
Career Highlights
Throughout his career, Yoshinori Kato has worked with notable companies, including Alps Electric Co., Ltd. His expertise in the field has led to numerous advancements in cleaning and processing technologies.
Collaborations
Kato has collaborated with several professionals in his field, including Yoshimi Kamijo and Mitsuru Kano. Their combined efforts have contributed to the development of innovative solutions in technology.
Conclusion
Yoshinori Kato's contributions to technology through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in cleaning and processing methods, showcasing the importance of innovation in the industry.