Alps Electric Co., Ltd.

Other

Sanyo Color Works, Ltd.

Yoshinori Kato

Yoshimi Kamijo

Mitsuru Kano

Masami Ikarashi

Masami Igarashi

Tsuyoshi Moriya

Shuji Moriya

Mitsuhiro Tachibana

Fumihiko Uesugi

Natsuko Ito

Yoshinari Sakikubo

Yoshio Takeda

Masaru Aomori

Kenichi Mitsumori

Jun Nakanowatari

Hitoshi Seki

Yorihiko Sasaki

Masahiko Yamaguchi

Naoki Yagi

Takemi Akimoto

Yasuhiro Miki

Tomoo Kamigaki

Masahiro Hatano

Takanori Sato

A cleaning end point detecting apparatus detects an end point of a cleaning process in which contamination attached to an inner wall of a reaction chamber is removed by introducing a cleaning gas into the chamber to produce a cluster cloud and detached particles. An irradiating unit irradiates a laser beam onto the cluster cloud and the detached particles within the reaction chamber to produce a scattered laser beam. A monitoring unit monitors the scattered laser beam as a two-dimensional image information. A judging unit judges the end point of the cleaning process on the basis of the two-dimensional image information. Preferably, the judging unit judges, as the end point of the cleaning process, a time instant when neither the detached particles nor the cluster cloud are detected on the basis of the two-dimensional image information.

Apparatus and method for detecting an end point of a cleaning process

A method for processing a substrate includes the steps of determining an allowable margin of process condition such that a substrate is processed without forming particles, selecting a process condition of a substrate for a production process such that the process condition falls in the allowable margin in the production process, and carrying out a processing of the substrate in the production process at the selected process condition, wherein the step of determining the allowable margin includes the steps of introducing an optical beam to an atmosphere in which the substrate is processed in the step of determining the allowable margin, and detecting scattering of the optical beam.

Vapor-phase processing method capable of eliminating particle formation

A electroluminescence device has a light emitting layer composed of a fluorescent powder and a liquid crystal between a transparent substrate formed with a transparent electrode and an insulating substrate formed with an opposed electrode.

Electroluminescent device having a liquid crystal layer adjacent to the

A dispersive type flexible luminescent base plate having a transparent electrode formed on one side of the plate, a layer of phosphor applied to the transparent electrode, and a second, flexible electrode disposed opposite to the transparent electrode. The base plate consists of film of synthetic resin. The second electrode is a lamination that consists of a conductive layer disposed on the phosphor layer side and a layer of a low resistance disposed on the external side. The conductive layer consists principally of conductive fine particles.

Dispersive type electroluminescent panel and method of fabricating same

A dichroic dye for coloring liquid crystal compositions are disclosed which is represented by the following general formula: ##STR1## in which Dye 1 and Dye 2 each represents a group of atoms necessary to form a linear dye structure containing an azo, azomethine or ester group; X represents a halogen atom; and n represents an integer of from 1 to 10. The dye is suited for use in color liquid crystal display devices, e.g., of guest-host type.

Dichoric dye for color liquid crystals having halogen substituted in

A film-covered terminal comprises a foil-like or plate-like electrode terminal with its opposite surfaces covered with sealing films through bonding layers respectively, a rivet of a conductive plastic material inserted through the electrode terminal, the bonding layers, and the sealing films, and welded to the electrode terminal, the bonding layers, and the sealing films, and a soldering member secured to an end portion of the rivet. A method of manufacturing a film-covered terminal is also disclosed which comprises the steps of covering opposite surfaces of a foil-like and plate-like electrode terminal with sealing films through bonding layers respectively, inserting a rivet of an electrically conductive plastic material into a through hole formed through the electrode terminal, the bonding layers, and the sealing films, the rivet having an end portion at which a soldering member is secured, and thermally press-bonding the opposite ends of the rivet.

Film-covered terminal

A transparent electrode for use in a dispersive type electroluminescent device or the like comprises a transparent substrate, a transparent electrode film on the substrate, and a number of closely spaced protective ridges continuous with each other on the electrode film.

Transparent electrode with protective, conductive grid

A dispersion electroluminescence element comprising a fluorescent powder layer which is formed on a transparent electrode by coating process and a counter electrode facing said transparent electrode with said fluorescent powder layer interposed therebetween, characterized in that the fluorescent particles in the fluorescent material layer are coated with copper after forming the layer on the transparent electrode and then laminating the counter electrode thereon.

Dispersion electroluminescent element

Disclosed is a film-covered terminal which comprises a foil-like or plate-like electrode terminal with its opposite surfaces covered with sealing films through bonding layers respectively, a rivet of a conductive plastic material inserted through the electrode terminal, the bonding layers, and the sealing films, and welded to the electrode terminal, the bonding layers, and the sealing films, and a soldering member secured to an end portion of the rivet. A method of manufacturing a film-covered terminal is also disclosed which comprises the steps of covering opposite surfaces of a foil-like and plate-like electrode terminal through bonding layers respectively, inserting a rivet of an electrically conductive plastic material into a through hole formed through the electrode terminal, the bonding layers, and the sealing films, the rivet having an end portion at which a soldering member is secured, and thermally press-bonding the opposite ends of the rivet.

Method of manufacturing film-covered terminal

A liquid crystal composition which comprises a liquid crystal compound having a smectic C phase and an optically active substance, both of said liquid crystal compound and optically active substance being compounds having an ester type bond in the molecular structure, and which has a lowered transition temperature region for the smectic C phase, is chemically stable and stable for use in field effect type liquid crystal display elements etc.

Liquid crystal mixture of a liquid crystal compound having a smectic C

A dispersive electroluminescence comprising a fluorescent layer coated on a transparent electrode, and an opposing electrode comprising a conductive layer in contact with the fluorescent layer and a low resistance external layer. The conductive layer is mainly composed of conductive fine particles, and majority of such conductive fine particles are three-dimensionally in contact with each other forming a conductive path and fill in the spaces in the surface of the fluorescent layer. The conductive layer is formed on the fluorescent layer by spraying a liquid composed of fine conductive particles dispersed in an organic liquid on the fluorescent layer and then drying it.

Dispersive type electroluminescent device and method for manufacturing

A dichromatic coloring matter for a colored liquid crystal display element comprising a compound of the general formula: ##STR1## where A and B each stand for ##STR2## where n is 0, 1, 2, 3 or 4, and X and Y each stand for ##STR3## where R.sub.1 and R.sub.2 stand for an alkyl group or hydrogen, --R (alkyl group) or --OR (alkoxy group).

Growing community of inventors

Furukawa, Japan

Yoshinori Kato