Company Filing History:
1 out of 832,880 Years Active: 2002
Title: Innovations of Yoshihiro Shimada
Introduction
Yoshihiro Shimada is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of integrated circuits, particularly in the development of capacitors. His innovative work has led to the filing of a patent that showcases his expertise and creativity in this area.
Latest Patents
Yoshihiro Shimada holds a patent for "Integrated circuit capacitors with barrier layer and process for making the same." This patent describes a process where a Ti/TiN adhesion/barrier layer is formed on a substrate and subsequently annealed. The anneal step is performed at a temperature that is 100°C above a base barrier anneal temperature, which varies based on the thickness of the barrier layer. The base barrier anneal temperature is approximately 700°C for a barrier thickness of about 1000 Å and about 800°C for a thickness of about 3000 Å. The barrier layer is required to be 800 Å thick or thicker. The process also includes the formation of a first electrode, followed by a BST dielectric layer and a second electrode. Additionally, a bottom electrode structure is disclosed, where a barrier layer of TiN is sandwiched between two layers of platinum. This innovative process and structure yield favorable results with various capacitor dielectrics, including ferroelectrics such as strontium bismuth tantalate.
Career Highlights
Yoshihiro Shimada's career is marked by his dedication to advancing technology in the field of integrated circuits. His innovative approach to capacitor design has positioned him as a key figure in this area of research. His work has not only contributed to the academic community but has also had practical implications in the electronics industry.
Collaborations
Yoshihiro Shimada has collaborated with esteemed colleagues such as Masamichi Azuma and Eiji Fujii. These collaborations have further enriched his research and have led to advancements in the field of integrated circuit technology.
Conclusion
Yoshihiro Shimada's contributions to the field of integrated circuits, particularly through his patent on capacitors, highlight his innovative spirit and technical expertise. His work continues to influence the development of advanced electronic components.