Yoshihide Nozaki

Title: Innovations of Yoshihide Nozaki

Introduction

Yoshihide Nozaki is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His work focuses on advanced heat treatment methods and apparatuses that enhance the efficiency and accuracy of semiconductor processing.

Latest Patents

One of Yoshihide Nozaki's latest patents is a heat treatment method and apparatus of light irradiation type. This innovation involves setting and inputting film information about a thin film formed on the front surface of a semiconductor wafer, substrate information about the semiconductor wafer, and the installation angle of an upper radiation thermometer. The emissivity of the front surface of the semiconductor wafer, which is formed with a multilayer film, is calculated based on various kinds of information. Furthermore, a weighted average efficiency of the emissivity is determined based on the sensitivity distribution of the upper radiation thermometer. This allows for accurate measurement of the front surface temperature of the semiconductor wafer during heat treatment, even when multiple thin films are present.

Another notable patent is the light irradiation type heat treatment method and apparatus. In this process, a semiconductor wafer is preheated with a halogen lamp and subsequently heated by a flash of light emitted from a flash lamp. The preheating with the halogen lamp continues for a short time even after the flash lamp turns off. A radiation thermometer measures both the front surface and back surface temperatures of the semiconductor wafer. A temperature integrated value is calculated by integrating the temperatures measured during the period from the start of the flash irradiation to the end of the heating. This innovation helps determine if the semiconductor wafer is cracked during flash irradiation by checking if the calculated temperature integrated value deviates from a preset range.

Career Highlights

Yoshihide Nozaki has worked with notable companies in the semiconductor industry, including Screen Holdings Co., Ltd. and Dainippon Screen Mfg. Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.

Collaborations

Throughout his career, Yoshihide Nozaki has collaborated with talented individuals such as Tomohiro Ueno and Takahiro Kitazawa. These collaborations have further enriched his work and led to advancements in semiconductor processing techniques.

Conclusion

Yoshihide Nozaki's contributions to semiconductor technology through his