Yonglai Tian

Title: Innovations of Yonglai Tian in Rapid Thermal Processing

Introduction

Yonglai Tian is a notable inventor based in Fairfax Station, Virginia, with a significant contribution to the field of rapid thermal processing and microwave heating technologies. He holds five patents that showcase his innovative approaches to material processing and nanostructure fabrication.

Latest Patents

One of his latest patents is titled "Method and apparatus for rapid thermal processing and bonding of materials using RF and microwaves." This invention describes a method and apparatus for the rapid and selective heating of materials through variable frequency RF and microwaves. The apparatus utilizes solid-state electronics as a microwave power source, along with a novel microwave heating head designed to couple microwave energy to target materials. It includes a match-up network to ensure frequency tuning and impedance matching between the microwave source and the load. An electronic and computer measurement and control system is integrated to monitor and control the microwave heating process. This method is particularly effective for thin conductive materials, such as metal films and impurity-doped silicon wafers, as well as dielectric materials like glass and ceramics. It enables rapid and selective heating of heterostructures for bonding and sealing of MEMS and integrated circuits, providing ultra-high heating speeds and temperatures.

Another significant patent by Yonglai Tian is focused on "Microwave heating for semiconductor nanostructure fabrication." This invention employs a microwave heating-based sublimation-sandwich SiC polytype growth method. It involves creating a sandwich cell with a source wafer and a substrate wafer, selectively heating them to create a temperature gradient. This process allows for the sublimation of Si- and C-containing species, which are then converted into liquid metallic alloy nanodroplets, facilitating the growth of nanostructures on the substrate wafer.

Career Highlights

Yonglai Tian has worked with various companies, including Fusion Lighting, Inc. His work has significantly impacted the development of advanced materials and processing techniques, particularly in the semiconductor industry.

Collaborations

He has collaborated with notable individuals such as Michael G. Ury and Douglas A. Kirkpatrick, contributing to the advancement of innovative technologies in his field.

Conclusion

Yonglai Tian's contributions to rapid thermal processing and microwave heating technologies have established him as a prominent inventor in the field. His innovative patents reflect a deep understanding of material science and engineering, paving the way for future advancements in semiconductor processing