This inventor holds 1 USPTO granted patent. Top assignee: Wonik Ips Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yong Taek Eom and Plasma-Based Substrate Processing
Introduction
Yong Taek Eom is an inventor associated with Wonik IPS Co., Ltd. in Cheonan-si, South Korea. His patent work includes an apparatus designed to process substrates using plasma.
Latest Patents
The provided information lists 1 patent for Eom: “Substrate Processing Apparatus.” The invention describes a process chamber and gas injection part that together define a space for substrate processing. Multiple plasma generation parts are positioned above the gas injection part to generate plasma and radicalize process gas before supplying it into the processing space. The plasma generation parts are arranged at different heights relative to the gas injection part’s bottom surface.
Career Highlights
Eom’s listed invention concerns plasma-based substrate processing, a technology used in semiconductor manufacturing. The available information associates his work with Wonik IPS Co., Ltd.
Collaborations
Kang Hee Kim and Hyun Kim are identified as Eom’s coworkers. The provided details do not specify their roles in the patent or whether they collaborated on this invention.
Conclusion
Yong Taek Eom’s listed patent focuses on a substrate processing apparatus that uses plasma and radicalized process gas, reflecting his connection to semiconductor processing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile