This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Psk Inc.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Yong Soo Yang: Innovator in Substrate Processing Technology.
Introduction
Yong Soo Yang is a notable inventor based in Hwaseong, South Korea. He has made significant contributions to the field of substrate processing technology. His innovative work has led to the development of a unique apparatus that enhances the efficiency of substrate processing.
Latest Patents
Yong Soo Yang holds a patent for a "Support unit and substrate processing apparatus including same." This patent describes a substrate processing apparatus that features a chamber defining a processing space, a gas supply unit that delivers process gas to the processing space, and a support unit that holds the substrate in place. The support unit includes a chuck for supporting the substrate, a power source that applies RF power to the chuck, and an ionization path designed to remove static electricity generated in the chuck. This invention is crucial for improving the reliability and performance of substrate processing.
Career Highlights
Yong Soo Yang is currently associated with Psk Inc., where he continues to innovate and develop advanced technologies in substrate processing. His work has been instrumental in pushing the boundaries of what is possible in this field.
Conclusion
Yong Soo Yang is a dedicated inventor whose contributions to substrate processing technology are noteworthy. His patent reflects his commitment to innovation and excellence in engineering.