Yogananda Sarode

Title: Yogananda Sarode: Innovator in Semiconductor Technology

Introduction

Yogananda Sarode is a prominent inventor based in Bengaluru, India, known for his contributions to semiconductor technology. With a total of two patents to his name, Sarode has made significant advancements in the field, particularly in improving thermal performance and leakage current stability in electrostatic chucks.

Latest Patents

One of Sarode's latest patents is titled "Electrostatic chucks with hybrid pucks to improve thermal performance and leakage current stability." This innovative device features a hybrid puck that includes a backing region made of a first dielectric material to enhance thermal performance, and a chucking region made of a second dielectric material to improve leakage current stability. Another notable patent is the "In-situ semiconductor processing chamber temperature apparatus." This invention provides methods and systems for in-situ temperature control, allowing for the delivery of a temperature-sensing disc into a processing region without breaking vacuum. The disc is equipped with cameras for IR-based imaging, enabling precise temperature measurements and adjustments within the processing chamber.

Career Highlights

Yogananda Sarode is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on developing advanced technologies that enhance the efficiency and reliability of semiconductor manufacturing processes.

Collaborations

Throughout his career, Sarode has collaborated with talented individuals such as Andrew Nguyen and Xue Chang. These partnerships have contributed to the successful development of innovative solutions in the semiconductor field.

Conclusion

Yogananda Sarode's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor manufacturing processes.