Company Filing History:
Years Active: 2024
Title: Yiyun Zhang: Innovator in Near-Field Lithography Technology
Introduction
Yiyun Zhang is an esteemed inventor based in Sichuan, China, known for his contributions to the field of lithography technology. With a focus on developing advanced systems for various industries, he has made a notable mark as a professional innovator.
Latest Patents
Yiyun Zhang holds a patent for a "Near-field lithography immersion system, immersion unit, and interface module thereof." This innovative system includes an immersion unit designed with a liquid flow channel and a gas flow channel that work in tandem to apply gas and confine an immersion liquid within the exposure field. The patent outlines the functionality of at least two interface modules, which comprise gas and liquid connectors, as well as a brake connector for the efficient management of the immersion unit. Additionally, the system features a mask loading module that facilitates the formation of an immersion field between the mask and a substrate, thereby enhancing the lithography process.
Career Highlights
Yiyun Zhang is affiliated with the Chinese Academy of Sciences, where he has significantly contributed to research and development in his field. His work has not only earned him recognition as an innovator but has also helped advance the technology behind lithography systems, which are essential in various manufacturing processes.
Collaborations
Throughout his career, Yiyun Zhang has collaborated with notable coworkers such as Xiangang Luo and Chengwei Zhao. These partnerships have fostered a dynamic research environment, leading to impactful technological advancements and shared knowledge in the realm of lithography.
Conclusion
Yiyun Zhang exemplifies the spirit of innovation through his dedicated work in near-field lithography technology. His patent contributions, coupled with his collaborative efforts at the Chinese Academy of Sciences, showcase his commitment to advancing technological frontiers. As the field continues to evolve, inventors like Yiyun Zhang play a crucial role in shaping the future of manufacturing and research.