Company Filing History:
Years Active: 2010-2012
Title: Innovations of Ying Yao in Microstructure Devices
Introduction
Ying Yao is a prominent inventor based in Ann Arbor, MI (US). He has made significant contributions to the field of microstructure devices, holding a total of 2 patents. His work focuses on innovative methods and devices that enhance the functionality and efficiency of semiconductor technologies.
Latest Patents
Ying Yao's latest patents include groundbreaking advancements in wafer-level, polymer-based encapsulation for microstructure devices. The first patent describes a device that features a first device structure with a semiconductor platform and a second device structure that includes a microstructure spaced from the semiconductor platform. This device incorporates a cable with multiple beams that connect the microstructure to the first device structure, with each beam coated in polymer and designed with a serpentine-shaped region.
The second patent outlines a method for fabricating a device with a microstructure. This method involves forming a connector on a semiconductor substrate, applying a polymer layer to the connector, and immersing the substrate and connector in an etchant solution. This process allows for the creation of the microstructure from the semiconductor substrate while ensuring that the microstructure remains connected to another element of the device through the coated connector. The microstructure is defined by creating an etch stop in the semiconductor substrate, and both the microstructure and substrate are coated with a polymer layer that can be selectively patterned.
Career Highlights
Ying Yao is affiliated with the University of Michigan, where he continues to advance research in microstructure technologies. His innovative approaches have positioned him as a key figure in the development of new semiconductor devices.
Collaborations
Ying Yao has collaborated with notable colleagues, including Kensall D Wise and Mayurachat Ning Gulari. Their combined expertise contributes to the advancement of research in microstructure devices.
Conclusion
Ying Yao's contributions to the field of microstructure devices through his patents and research at the University of Michigan highlight his role as an influential inventor. His innovative methods and collaborations continue to push the boundaries of semiconductor technology.