Yilong Su

Title: Yilong Su: Innovator in Corrosion-Resistant Technology

Introduction

Yilong Su is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of gas delivery systems and plasma processing technology. His innovative approach has led to the development of a unique patent that addresses critical issues in these areas.

Latest Patents

Yilong Su holds a patent for a corrosion-resistant gas delivery assembly and plasma processing apparatus. This invention discloses a corrosion-resistant gas delivery assembly that combines an inlet gas delivery component with a gas diffusion component. These components are arranged in a liner body, forming a multi-component structural configuration. This design effectively prevents direct contact of the process gas with the liner body, mitigating surface defects caused by high temperatures. The advantages of this invention include the prevention of corrosion in the gas delivery assembly and plasma processing apparatus, as well as the resolution of metal and solid particle contamination issues in the reaction chamber.

Career Highlights

Yilong Su is currently employed at Advanced Micro-Fabrication Equipment Inc. in China. His work focuses on enhancing the reliability and efficiency of gas delivery systems used in various industrial applications. His innovative solutions have positioned him as a key figure in the field of micro-fabrication technology.

Collaborations

Yilong Su collaborates with talented professionals such as Rason Zuo and Miaojuan Chen. Together, they work on advancing technologies that improve the performance and safety of gas delivery systems.

Conclusion

Yilong Su's contributions to the field of corrosion-resistant technology demonstrate his commitment to innovation and excellence. His patent addresses significant challenges in gas delivery systems, showcasing his expertise and dedication to advancing technology.