This inventor holds 1 USPTO granted patent. Top assignee: Nan Ya Technology Corporation. Active years: 1999.
Company Filing History:
Years Active: 1999
Title: Yi-Yu Shi: Innovator in Semiconductor Technology
Introduction
Yi-Yu Shi is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent related to device isolation processes.
Latest Patents
Yi-Yu Shi holds a patent for a "Modified LOCOS isolation process for semiconductor devices." This invention discloses a method that begins with the formation of a shielding layer over a semiconductor substrate. The shielding layer is patterned to create an opening that exposes a portion of the substrate for device isolation. Oxygen ions are then implanted at a tilt angle into the substrate, forming a doped region that extends under the shielding layer's margin. A thermal oxidation process follows, resulting in a field oxide layer. This method effectively eliminates the bird's beak effect commonly seen in traditional LOCOS processes. The shielding layer is subsequently removed, completing the fabrication process.
Career Highlights
Yi-Yu Shi is associated with Nan Ya Technology Corporation, where he applies his expertise in semiconductor technology. His work has been instrumental in advancing the methods used in the industry.
Collaborations
Some of his notable coworkers include Da-Zen Chuang and Po-Sheng Chang, who have collaborated with him on various projects within the semiconductor field.
Conclusion
Yi-Yu Shi's contributions to semiconductor technology, particularly through his patented innovations, highlight his role as a key figure in the industry. His work continues to influence advancements in device isolation processes.