Yi-Ting Fei

Title: Yi-Ting Fei: Innovator in UV Optical Materials

Introduction

Yi-Ting Fei is an accomplished inventor based in Oviedo, FL (US). She has made significant contributions to the field of optical materials, particularly in the area of immersion lithography. Her innovative work has led to the development of advanced materials that enhance the performance of ultraviolet (UV) optical elements.

Latest Patents

Yi-Ting Fei holds a patent for "High-index UV optical materials for immersion lithography." This invention focuses on a material designed for use as a UV optical element, specifically for a 193 nm immersion lens element. The material comprises a Lithium Magnesium Aluminate (LMAO) body, which includes a disordered lithium magnesium spinel. This compound has the general composition of LiMgAlO, where x ranges from 0 to 1, serving as a high-index UV transparent material for immersion lithography. The LMAO body is characterized by its cubic symmetry, optical isotropy, and reduced intrinsic birefringence (IBR), making it suitable for photolithography applications.

Career Highlights

Yi-Ting Fei is currently employed at Crystal Photonics, Inc., where she continues to push the boundaries of optical material innovation. Her work has been instrumental in advancing the capabilities of UV optical elements, which are critical in various high-precision applications.

Collaborations

Throughout her career, Yi-Ting has collaborated with notable colleagues, including Shen Jen and Bruce Chai. These partnerships have fostered a collaborative environment that enhances the development of cutting-edge technologies in the field of optics.

Conclusion

Yi-Ting Fei's contributions to the field of UV optical materials exemplify her dedication to innovation and excellence. Her patent on high-index UV optical materials for immersion lithography showcases her expertise and commitment to advancing technology in this critical area.