This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Semiconductor Manufacturing International (Shanghai) Corporation. Active years: 2011.
Company Filing History:
Years Active: 2011
Title: Yi'nan Han: Innovator in Wafer Planarization Technology
Introduction
Yi'nan Han is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of wafer planarization. His innovative methods aim to enhance the quality and efficiency of semiconductor devices.
Latest Patents
Yi'nan Han holds a patent for a "Method for planarization of wafer and method for formation of isolation structure in top metal layer." This invention discloses a planarization method for a wafer with a surface layer that has a recess. The process involves forming an etching-resist layer on the surface layer to fill the entire recess, followed by etching the etching-resist layer and the surface layer until the surface layer outside the recess is flush with or lower than the bottom of the recess. The etching speed of the surface layer is higher than that of the etching-resist layer. After removing the etching-resist layer, the surface layer is etched to a predetermined depth. This method effectively avoids concentric ring recesses on the wafer's surface, which are often a result of the chemical mechanical polishing (CMP) process in prior art. The invention is particularly useful for obtaining a wafer surface suitable for optical applications. Yi'nan Han has 1 patent to his name.
Career Highlights
Yi'nan Han is currently employed at Semiconductor Manufacturing International Corporation, where he continues to develop innovative solutions in semiconductor technology. His work has been instrumental in advancing the manufacturing processes used in the industry.
Collaborations
He collaborates with talented colleagues, including Yiqun Chen and Xianyong Pu, who contribute to the innovative environment at Semiconductor Manufacturing International Corporation.
Conclusion
Yi'nan Han's contributions to wafer planarization technology exemplify the importance of innovation in the semiconductor industry. His patented methods not only improve manufacturing processes but also enhance the performance of semiconductor devices.