Yi Chien Lee

Title: Yi Chien Lee: Innovator in Non-Destructive Inspection Technologies

Introduction

Yi Chien Lee is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in non-destructive inspection methods. With a total of 2 patents, his work has advanced the techniques used in the industry.

Latest Patents

One of Yi Chien Lee's latest patents is a method for non-destructive inspection of cell etch redeposition. This innovative method involves capturing a grayscale image of a plurality of cells on a wafer. The grayscale image provides a top-down view of the cells and is captured in situ after etching to form the cells. The method identifies non-region of interest (non-ROI) pixels corresponding to the cells. These non-ROI pixels are subtracted from the grayscale image to determine the remaining ROI pixels. The ROI pixels correspond to material on the sidewalls of, and in recesses between, the cells. An amount of etch redeposition on the sidewalls and in the recesses is then scored based on the gray levels of the ROI pixels. The wafer is subsequently processed based on this score.

Career Highlights

Yi Chien Lee is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His work at this leading semiconductor manufacturer has positioned him as a key player in the development of advanced inspection technologies.

Collaborations

Some of Yi Chien Lee's notable coworkers include I-Che Lee and Huai-Ying Huang. Their collaborative efforts contribute to the innovative environment at Taiwan Semiconductor Manufacturing Company Ltd.

Conclusion

Yi Chien Lee's contributions to non-destructive inspection methods in semiconductor manufacturing highlight his role as an influential inventor. His patents reflect a commitment to advancing technology in the industry.