This inventor holds 1 USPTO granted patent and 12 published patent applications. Top assignee: Samsung Display Co., Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Yeonguk Kim - Innovator in Voltage Waveform Control
Introduction
Yeonguk Kim is an inventor based in Suwon-si, South Korea. He has made significant contributions to the field of voltage waveform control. His innovative approach focuses on enhancing substrate processing methods and apparatus.
Latest Patent Applications
Yeonguk Kim's notable patent application is titled "VOLTAGE WAVEFORM CONTROLLING METHOD, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS." This application outlines a voltage waveform control method that generates a non-sinusoidal wave. The method includes a pulse period with a positive bias voltage and a ramp period with a negative bias voltage. It also describes a first transition period that changes from the pulse period to the ramp period, and a second transition period that changes from the ramp period back to the pulse period. The application emphasizes adjusting the length of the negative voltage period to be at most 20% of the total length of the waveform period. Additionally, it discusses adjusting the slope of the ramp period and outputting an adjusted voltage waveform based on these parameters.
Conclusion
Yeonguk Kim's work in voltage waveform control showcases his innovative spirit and dedication to advancing technology in substrate processing. His contributions, although not yet reflected in granted patents, hold promise for future developments in the field.