Yasuyuki Matsuoka

Title: Yasuyuki Matsuoka: Innovator in Plasma Processing Technology

Introduction

Yasuyuki Matsuoka is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique patent that enhances the efficiency of processing chambers.

Latest Patents

Matsuoka holds a patent for a focus ring and plasma processing apparatus. This invention features a focus ring that is detachably attached to the top surface of an outer peripheral portion of a mounting table in a processing chamber. The focus ring includes an annular main body with a back surface designed for attachment to the mounting table. Additionally, it incorporates a thermally conductive sheet that is fixed to the annular main body. This sheet is interposed between the annular main body and the top surface of the mounting table. The innovative design allows for improved thermal management during plasma processing.

Career Highlights

Yasuyuki Matsuoka is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing plasma processing technologies. Matsuoka's dedication to innovation has positioned him as a key figure in his field.

Collaborations

Matsuoka has collaborated with notable colleagues, including Nobuyuki Nagayama and Naoyuki Satoh. Their combined expertise has contributed to the success of various projects within the company.

Conclusion

Yasuyuki Matsuoka's contributions to plasma processing technology through his innovative patent demonstrate his commitment to advancing the field. His work continues to influence the industry and inspire future innovations.