This inventor holds 2 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 1998-2001.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1998-2001
Title: Yasuyuki Kuriki: Innovator in Substrate Processing Technology
Introduction
Yasuyuki Kuriki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His work focuses on developing advanced apparatuses that enhance the efficiency and effectiveness of processing substrates in various applications.
Latest Patents
Kuriki's latest patents include a substrate processing apparatus and a plasma processing apparatus. The substrate processing apparatus features a processing section with multiple process units designed for applying a series of processes, including resist coating, developing, and etching. It incorporates a main transferring mechanism that moves along a designated path to transfer and receive processing substrates. Additionally, it includes a loading/unloading portion with a mechanism for efficient substrate handling.
The plasma processing apparatus is of the induction coupling type, specifically designed for processing LCD substrates. It consists of an airtight process room with a work table for supporting the substrate. A vacuum pump is utilized to maintain the necessary vacuum conditions. The apparatus also features an antenna block with dielectric layers and an RF antenna that generates an electric field, allowing for the transformation of process gas into plasma.
Career Highlights
Yasuyuki Kuriki has established himself as a key figure in the substrate processing industry through his innovative designs and patents. His work at Tokyo Electron Limited has positioned him at the forefront of technological advancements in this field.
Collaborations
Kuriki collaborates with notable colleagues, including Hideyuki Takamori and Kozo Hara, contributing to a dynamic and innovative work environment.
Conclusion
Yasuyuki Kuriki's contributions to substrate processing technology through his patents and collaborative efforts highlight his role as a leading inventor in the industry. His work continues to influence advancements in processing techniques and apparatus design.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile