Location History:
- Kawasaki, JP (1984 - 1985)
- Tokyo, JP (1986 - 2001)
Company Filing History:
Years Active: 1984-2001
Title: Innovations of Yasuyoshi Yamada
Introduction
Yasuyoshi Yamada is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of exposure technology, holding a total of seven patents. His work primarily focuses on enhancing the efficiency and effectiveness of exposure units and systems.
Latest Patents
Yamada's latest patents include an exposure unit and an exposure system and device manufacturing method. This network-type exposure unit is designed to connect via a communication network to other exposure units or an information processor. It determines whether the exposure work information of the instructed kind is stored within it. If the information is found to be non-existent, the unit inquires with other exposure units or host equipment to check for the required exposure work information. This innovation allows for the transfer of exposure work information between arbitrary units, simplifying the maintenance and management processes.
Another notable patent is a mask aligner equipped with a wafer position detecting device. This device features a TV image pick-up system that captures the image of a wafer detection pattern, generating TV signals. A fine alignment device detects any positional deviation of the wafer relative to a mask during exposure. The transport stage carries the wafer from the image pick-up station to the exposure station, while a processing device determines the positional deviation based on the TV signals. This technology ensures precise alignment of the wafer with the mask, enhancing the overall exposure process.
Career Highlights
Yasuyoshi Yamada is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to develop innovative technologies that have a significant impact on the industry.
Collaborations
Yamada has collaborated with notable coworkers, including Naoki Ayata and Ryozo Hiraga. Their combined expertise has contributed to the advancement of exposure technologies and the successful development of various patents.
Conclusion
Yasuyoshi Yamada's contributions to exposure technology through his innovative patents have established him as a key figure in the field. His work continues to influence advancements in imaging and optical systems, showcasing the importance of innovation in technology.