Kawagoe, Japan

Yasuo Hibino


Average Co-Inventor Count = 9.0

ph-index = 1

Forward Citations = 13(Granted Patents)


Company Filing History:

goldMedal1 out of 832,880 
Other
 patents

Years Active: 2003

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1 patent (USPTO):Explore Patents

Title: Innovations of Yasuo Hibino in Dry Etching Technology

Introduction

Yasuo Hibino is a notable inventor based in Kawagoe, Japan. He has made significant contributions to the field of dry etching technology, particularly with his innovative approach to environmentally friendly etching gases. His work is characterized by a commitment to addressing global environmental challenges through technological advancements.

Latest Patents

Hibino holds a patent for a fluorocarbon-based dry etching gas that is free of global environmental problems. This innovative dry etching method utilizes a plasma gas derived from the fluorinated ether of carbon, fluorine, hydrogen, and oxygen, containing 2-6 carbon atoms. This patent reflects his dedication to creating sustainable solutions in the semiconductor manufacturing process.

Career Highlights

Throughout his career, Yasuo Hibino has focused on developing technologies that minimize environmental impact while enhancing efficiency in industrial applications. His work has positioned him as a key figure in the advancement of dry etching methods, which are crucial in the production of microelectronic devices.

Collaborations

Hibino has collaborated with esteemed colleagues such as Akira Sekiya and Tetsuya Takagaki. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas, further enhancing the impact of their collective work.

Conclusion

Yasuo Hibino's contributions to dry etching technology exemplify the intersection of innovation and environmental responsibility. His patent for a sustainable etching gas showcases his commitment to advancing the field while addressing pressing global issues. His work continues to inspire future innovations in the industry.

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