Company Filing History:
Years Active: 2021
Title: Yasuhiro Otsuka: Innovator in Semiconductor Manufacturing
Introduction
Yasuhiro Otsuka is a prominent inventor based in Amagasaki, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent.
Latest Patents
Otsuka holds a patent for a manufacturing method of a sample table. This method is designed to hold a semiconductor wafer during plasma processing. The process involves preparing an adsorption plate with a specially treated contact surface that effectively adsorbs the semiconductor wafer. Additionally, a supporting substrate is created with a recess surface that adheres to the noncontact surface of the adsorption plate. The design ensures that the depth differences in the recess surface and the thickness of the adsorption plate are optimized for effective performance.
Career Highlights
Yasuhiro Otsuka is associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work has been instrumental in advancing manufacturing techniques that enhance the efficiency and effectiveness of semiconductor processing.
Collaborations
Otsuka has collaborated with notable coworkers, including Wataru Yoshikawa and Kazuki Moyama. Their combined expertise contributes to the innovative environment at Tokyo Electron Limited.
Conclusion
Yasuhiro Otsuka's contributions to semiconductor manufacturing through his patent demonstrate his commitment to innovation in the field. His work continues to influence the industry and pave the way for future advancements.