Company Filing History:
Years Active: 2000
Title: Innovator Spotlight: Yao-Chanet Chu and His Contributions to Wafer Exposure Systems
Introduction: Yao-Chanet Chu is a prominent inventor based in Tainan, Taiwan, recognized for his innovative work in the semiconductor industry. With a focus on enhancing the precision of wafer exposure systems, his inventions contribute significantly to the advancement of manufacturing technologies.
Latest Patents: Yao-Chanet Chu holds a patent for a "Real-time Local Defocus Monitor System Using Maximum and Mean Angles." This groundbreaking apparatus and method allows for the determination of local de-focus issues in a wafer exposure system on a real-time basis. By adjusting the distance of a wafer from an objective lens and rotating the wafer around two orthogonal axes at each field position, the system achieves optimum focus for each field of the wafer. The rotational data is processed by a computer, which analyzes whether the rotational angles exceed critical thresholds. If these critical angles are exceeded, it signals potential local de-focus that necessitates inspection of the exposure system for defects. This efficient method ensures that any issues are identified in real-time, optimizing production workflows.
Career Highlights: Yao-Chanet Chu plays a crucial role at Taiwan Semiconductor Manufacturing Company Ltd., a leading entity in semiconductor technology. His work at TSMC highlights his commitment to improving manufacturing processes, particularly in the area of wafer exposure.
Collaborations: Yao-Chanet Chu has collaborated with notable colleagues, including Hung-Chih Chen and Tzu-Yu Lin. These partnerships within TSMC demonstrate the collaborative spirit that drives innovation in the semiconductor field.
Conclusion: Yao-Chanet Chu's contributions to the semiconductor industry, particularly through his innovative patent for a real-time defocus monitoring system, showcase his dedication to enhancing wafer exposure technologies. His work and collaborations within Taiwan Semiconductor Manufacturing Company Ltd. continue to push the boundaries of semiconductor manufacturing, ensuring precision and efficiency in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.